Product Specification
Outline Size |
2~12" |
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Conductive Type |
N Type or P Type or Intrinsic |
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Conductive Type |
50~300mm |
|
Thickness |
250 ~600 μm |
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Thickness Deviation |
±10μm |
|
The thickness of the oxide layer |
50nm~1000nm |
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Total Indicated Runout(TIR) |
< 3 μm |
|
BOW |
≤15μm |
|
TTV: |
≤15μm |
|
roughness |
<0.5nm |
|
Resistivity |
0.001-15000 (Ω·cm) |
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Crystal Orientation |
〈100〉;〈110〉;〈111〉 |
|
Grade |
IC级 |
|
Surface Treatment: |
Lapping, Single Side Polishing, Double Side Polishing |
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