Diameter

2 inch,

3 inch

4 inch

5 inch - 7 inch

Thickness

500±15 µm, 660±15 µm, 710±15 µm, 790±15 µm, 1000±20 µm

Orientation

X-Axis Y-Axis Z-Axis ±0.1° Y-axis 128° Rotated, Y-axis 64° Rotated, Y-axis 41° Rotated

The first reference to the Orientation

± 0.2°

The first reference to the length

16.0±0.8 mm

22.0 ±1.0 mm

32.5±1.5 mm

comply with the the provisions of standard production

TTV

≤10 µm

≤15 µm

≤20 µm

≤30 µm

BOW

≤10 µm

≤15 µm

≤20 µm

≤30 µm

Front polishing

10/5

Back Surface

Fine ground, (#240/#180) / Polished, 10/5

Chamfer

< 0.3 mm, 45°±5°